Oxide Solid Solution Prepared by a Combined SimplePolymer Heating and D.C.-Magnetron Sputtering Method. Neodymium-doped Cerium Oxide (NDC) solid solution is attractive alternative material to replace yttria-stabillizedzirconia (YSZ) used as an electrolyte for solid-oxide fuel cells (SOFCs). In this study Nd-Ce02 nanoparticIeswith Nd of 3, 6 and 9 at.!at.-% were synthesized by simple polymer heating. The NDC thin films were deposited onsilicon substrates by using target made from the nanoparticIes. Deposition process was carried out by D.C.-magnetronsputtering at temperature as low as 375°C. XRD pattern was used to confirm solid solubility and structural properties ofthe films. The results indicated that all samples are single phase solid solution with cubic fluorite structure. Their latticeparameters increase with increasing Nd content. It was also found that the mean grain size decrease with increasing Ndcontent. SEM analysis showed that NDC thin films have dense and uniform thickness. These results revealed that thenanoparticIes and thin films of NDC solid solution are successfully prepared by a combined simple polymer heating andD.C.-Magnetron Sputtering method at low temperature.Keywords: Cerium oxide, D.C. magnetron sputtering, nanoparticIes, polymer heating. I. Nurhasanahl, M. Abdullah2, and Khairurrijae1Department of Physics, Faculty of Mathematics and Natural Sciences,Diponegoro University, Semarang, 50275, Indonesia2 Physics of Electronics Materials Research Division, Faculty of Mathematics and Natural Sciences,Institut Teknologi Bandung, Bandung 40132, Indonesia.
